Amorphous Silicon (a-Si:H)/Silicon Nitride (a-SiNx:H) Superlattice by D.C Plasma Enhanced Chemical Vapour Deposition: Preparation and Characterisation

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Abstract

Amorphous Silicon (a-Si:H)/Silicon Nitride (a-SiNx:H) Superlattice by D.C Plasma Enhanced Chemical Vapour Deposition: Preparation and Characterisation

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Published

30-06-2005

Issue

Vol. 24 No. 1 (2005): June 2005

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Short Communication

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How to Cite

Amorphous Silicon (a-Si:H)/Silicon Nitride (a-SiNx:H) Superlattice by D.C Plasma Enhanced Chemical Vapour Deposition: Preparation and Characterisation. (2005). Malaysian Journal of Science (MJS), 24(1), 88. https://mjir.um.edu.my/index.php/MJS/article/view/17173